MDX 系列10 kW電源在真空環(huán)境中經(jīng)久耐用,其小巧的尺寸使其成為實驗室系統(tǒng)的理想解決方案。它們最常用作直流磁控濺射電源;在該領(lǐng)域,二者精密的調(diào)節(jié)性能、一流的滅弧功能和較低的存儲輸出能量使之成為業(yè)界領(lǐng)先產(chǎn)品。它們還在射頻濺射和蝕刻系統(tǒng)中被用作精密調(diào)節(jié)的偏壓電源。
AE MDX直流磁控濺射電源:
Equipment Details: DC Magnetron Sputtering Power Supply
Used as DC magnetron sputtering drives where regulation, superior arc quenching and low output energy are required
Standard Z
Power Output: 10 kW
Regulation: 0.25 percent in all modes, power, current, voltage
Remote panel controller
208V, 3 Ph, 50/60 Hz, 38A. |
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