外延生長級拋光磷化銦基片
Crystal Materials 晶體材料 Single Crystal Indium Phosphide, VGF/ LEC grown, 高純單晶
Crystal Orientation (1 0 0) / (1 1 1)
Dopant 摻雜 Fe / Undoped S / Sn
Diameter 直徑 50.8 ± 0.25mm / 76.2± 0.25mm / 100.0 ± 0.4mm
Thickness 厚度 325 ± 25um / 425 ± 25um / 500 ± 25um
Orientation 晶向 ( 100 ) α 0 ±β 0 , off angle α and accuracy β, upon request
Resistivity 電阻率 (1-10)x10 7 Ω.cm (1-10)x10 -3 Ω.cm
Mobility 遷移率 ≥ 2000 cm 2 / V·sec N / A
Carrier Concentration 摻雜濃度 N / A (0.1-3.0)×10 18 /cm3
Etch Pit Density 腐蝕缺陷密度 ≤ 5·10 3cm-2 /5·10 4cm-2 ≤ 5·10 2 cm -2
Orientation(OF) Flat, EJ / US 主定位邊 (0-1-1)±0.5deg, 16 ±1.0mm /22±1.0mm/32.5±1.0mm
Identification(IF) Flat, EJ / US 次定位邊 (0-1 1) )±5.0 deg, 8 ±1.0mm / 11±1.0mm/ 18±1.0mm
Front Side Surface 正面 Polished in Epi-ready Prime grade, 外延生長級拋光
Backside Surface 反面 Polished / Lapping or etched, 拋光 / 研磨或腐蝕
Packaging 包裝 N2 filled , cassette / fluoroware, 25pcs /single piece, 100級潔凈室真空沖氮包裝,25片卡盒/單片幣式 |
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